Robust Control Design Based on Perturbation Cancellation for Micro-Positioning Design with Hysteresis

Yung-Yue Chen,Yu-Jen Lan,Yi-Qing Zhang

doi:10.3390/act10110278

Abstract

Based on the superiority of the piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, a piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating the effects of hysteresis and modeling uncertainties that appeared in this micro-positioning actuator, a nonlinear adaptive fuzzy robust control design with a perturbation cancellation ability is proposed for this micro-positioning design to achieve a positioning resolution of 1 μm. Structurally, this proposed robust control methodology contains two particular parts: a universal fuzzy approximator and a robust compensator, which are employed to cancel the modeling uncertainties caused by the perturbed parts of the micro-positioning actuator and mitigate the approximation error between the modeling uncertainties and the universal fuzzy approximator, respectively. From both the numerical simulations and real validations, this proposed micro-positioning design performs a promising positioning performance in the micrometer level.

Highlights

Due to the ongoing development of the miniaturization of electronic elements and the dense integration of electronic chips on silicon wafers, there has been a tremendous and growing demand for more advanced and innovative micro/nano positioners in recent decades [1]
The perturbations are set up for perturbed terms (m, b, e k, d, α, β, reason why only ±1% random perturbations are considered for these perturbed terms is that the feedback linearization (FL) design will diverge for a micro-positioning actuator with perturbed bounds beyond this value
Integrating a piezoelectric actuator and a nonlinear adaptive fuzzy robust control law, a micro-positioning actuator is established in this investigation

Summary

Introduction

Due to the ongoing development of the miniaturization of electronic elements and the dense integration of electronic chips on silicon wafers, there has been a tremendous and growing demand for more advanced and innovative micro/nano positioners in recent decades [1]. Much attention has been paid to the piezoelectric actuator owing to its superior characteristics, such as higher resolution in terms of displacement, overwhelming force [12], negligence of wear and tear [13], lightweight and high electric mechanical transformation efficiency [14], great stiffness, wide bandwidth, fast response, good stability, long lifespan, anti-electromagnetic interference [15], etc. Except for these advantages, the piezoelectric actuator attaches the harmful hysteresis effect, which results from its unique crystalline polarization effect [16]. Thereby, resolving the hysteresis effect of the piezoelectric actuator is one of the most considerable concerns in the micro-positioning design of piezoelectric-based actuators [17]

Results

Discussion

Conclusion