Robust and precision control for a directly-driven XY table

Abstract

To provide faster, more repeatable, and stronger microelectronics bonding technology, this article presents the design and implementation of a robust and precision controller for a high-speed linear voice-coil motor, direct-drive, XY positioning table. Moreover, the dynamic design methodology of the control system for the positioning table is proposed based on electromechanical co-simulation. Using the finite-element method and dynamic analysis, the rigid–flexible coupled mechanical model of the XY table is established. With the aid of the system identification approach, the open-loop model of the control system for the X-axis table is obtained. On this basis, the proportion integration differentiation controller with incomplete derivation and the sliding mode controller (SMC) with the exponential reaching law are designed to control the X-axis table. The performances of the controllers are investigated using electromechanical co-simulations and experimental tests, and the results show that the motion overshoot and settling time are reduced using the SMC with an exponential reaching law. The SMC with the exponential reaching law also shows strong robustness against external disturbances. The experiment and co-simulation results are in good agreement, which confirms the validity and feasibility of the dynamic design methodology for a high-speed and high-accuracy positioning table based on electromechanical co-simulation.