Abstract

This paper presents an adaptive variable structure controller with on-line identification of the upper bounds of uncertainties and disturbance for MEMS triaxial angular sensors device that is able to detect rotation in three orthogonal axes, using a single vibrating mass. An adaptive robust sliding mode controller is developed and the stability of the closed-loop system can be guaranteed with the proposed adaptive robust sliding mode control strategy. The on-line identification of the upper bounds of uncertainties and disturbance can be incorporated into sliding mode controller to alleviate the chartering. The proposed adaptive sliding mode controller updates estimates of all stiffness, damping errors, and input rotation parameters, upper bound of uncertainties and disturbance in real time, removing the need for any offline calibration stages. The numerical simulation for MEMS gyroscope triaxial angular sensor is investigated to verify the effectiveness of the proposed adaptive robust sliding mode control scheme.

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