Abstract

This paper describes a robust adaptive compensation method for friction and force ripple present in the dynamics of permanent-magnet linear motors. The method is used in ultraprecise positioning applications. The compensation algorithm consists of a PID component and an adaptive component for estimating friction and force ripple. The adaptive component is continuously refined on the basis of just prevailing input and output signals. Computer simulations and real-time experimental results verify the effectiveness of the proposed scheme for high-precision motion trajectory tracking.

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