Abstract
This study intensively investigates the Ritchey–Common test to enable high-precision measurement of a plane mirror figure with a diameter of 1.5 m. We present a method for separating the adjustment error combined with tested data and the least–square method. We also use the transformation relationship of coordinates and amplitude between the test system pupil plane and the flat mirror to calculate the flat mirror surface error. Ritchey–Common test is conducted on a 100 mm–diameter plane mirror. Results prove that the algorithm can effectively isolate the adjusting–error effect. Compared with the direct test results from interferometer, the RMS calculation accuracy of the algorithm is better than l/100 (l = 0.6328 μm). Accordingly, we build a Ritchey–Common test light path for the 1.5 m plane mirror. After analyzing the factors affecting the experiment results, we obtain the surface PV value of 0.391 l and RMS of 0.0181 l. Finally the test achieves full aperture detection for a large–diameter plane mirror surface.
Highlights
The problem of measuring a large-diameter mirror surface in high precision has not been properly solved because of the limitations of test equipment and conditions [1, 2]
Compared with a large caliber interferometer, a high–precision spherical mirror, which is 1.3 times greater in diameter than the flat mirror being tested as a reference mirror, is easy to fabricate
D1, D2 represents the surface error that the flat coordinate mapped from the Zernike polynomial defocus term in pupil coordinates at different test angles
Summary
The problem of measuring a large-diameter mirror surface in high precision has not been properly solved because of the limitations of test equipment and conditions [1, 2]. Ritchey– Common test is an effective way to test a plane mirror surface with a large diameter [3]. The testing process is relatively stable and can detect large-diameter mirrors with the use of a small caliber interferometer [4]–[7]. We analyzed the transformation relationship between the system wavefront aberration and surface error of the plane mirror that was tested, and built a theoretical model of the algorithm. The experiment was conducted on a small-caliber plane mirror, which proves that the algorithm can effectively isolate the adjusting-error effect and achieve high-precision measurement. The measurement of the 1.5 m plane mirror surface was achieved using the two–angle test
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