Abstract
It is difficult to plan capacities of a semiconductor wafer fabrication with constraints of queue time which means a waiting time from the end of a step to the start of the next step for warranting production quality. If the queue time constraints could not be kept, the product is scrapped or reprocessed for qualitative recovery, and production efficiency remarkably decreases. This paper proposes an evaluation method which enables capacity planning of a fab with the queue time constraints, and shows its validity by simulation experiments. Furthermore we present an effectiveness of the method by applying to actual production lines.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
