Ring defects in n-type Czochralski-grown silicon: A high spatial resolution study using Fourier-transform infrared spectroscopy, micro-photoluminescence, and micro-Raman

Abstract

We investigated ring defects induced by a two-step anneal in n-type Czochralski-grown silicon wafers using a combination of high spatial resolution Fourier Transform Infrared Spectroscopy (FTIR), micro-photoluminescence (PL) mapping, and micro-Raman mapping. Through FTIR measurements, we show the inhomogeneous loss in interstitial oxygen with a positive correlation with the inverse lifetime. Using high-resolution micro-PL mapping, we are able to distinguish individual recombination-active oxygen precipitates within the rings with a decreasing density from the center to the edge of the sample. The radial inhomogeneity of the oxygen precipitates is likely to be related to variations in the distribution of grown-in defects. We also demonstrate that micro-Raman mapping reveals the oxygen precipitates without the smearing effects of carrier diffusion that are present in micro-PL mapping.