Abstract
The poor reliability of the GeO2/Ge stack is improved by appropriate cation doping [e.g., Yttrium (Y)-doping] into amorphous GeO2 as a result of the enhancement of the GeO2 network structure stability. In this paper, we discuss the impact of Y-doping on structural modulation of GeO2 on a Ge substrate in thermal treatment. By doping a small amount of Y into amorphous GeO2, the crystallization of GeO2 to $\alpha $ -quartz and $\alpha $ -cristobalite structures is efficiently suppressed without toughening the local Ge-O bond. This is direct evidence of rigidity enhancement of the GeO2 tetrahedral network structure by cation doping.
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