Abstract
An RIE (CH4/H2 process is presented for the production of up to 1 µm-deep first-order Bragg gratings with a grating constant of A = 0.23µm in InP and GaInAsP. A Bragg grating filter on a GaInAsP/InP rib waveguide showed a stopband width as large as 5nm at −10dB and a nearly rectangular shape of the filter function.
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