Abstract

Before we discuss analysis of film textures by the x-ray pole figure and reflection high-energy electron diffraction (RHEED) pole figure (transmission mode) techniques, we present in this chapter a more familiar use of RHEED, the reflection mode. This technique has been used extensively for the determination of surface structure and for studies of surface ordering. It is most useful for surfaces that possess a decent long-range order with perhaps some extended defects such as surface steps. X-ray can also be used for these purposes with a glancing incidence diffraction geometry, but it would require a very intense source such as synchrotron radiation. In this chapter, we discuss kinematic treatment of electron scattering and the formulation of angular intensity distribution in both layer-by-layer and multilayer growths. More extensive discussion of RHEED in the transmission mode will be presented in Chaps. 6 and 7.

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