Abstract
Abstract A surface of a diamond thin film grown homoepitaxially on a C(001) substrate by microwave plasma chemical vapor deposition (CVD) has been studied using reflection high-energy electron diffraction (RHEED) and atomic force microscopy (AFM). The RHEED pattern showed the C(001)2×1/1×2 double-domain structure. The AFM images taken from the same sample in air showed 1×1 but locally 2×1 structure, which was confirmed by the Fourier transformed pattern of the AFM image.
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