Abstract

This paper presents results from a study of the nitriding of AISI-316 stainless steel by a low-pressure pure-nitrogen rf plasma at a temperature of 400°C. The nitrided layers were examined with scanning electron microscopy, X-ray diffraction, Rutherford backscattering and microhardness measurements. The results, when correlated with results from Langmuir-probe and spectroscopy measurements on the plasma, suggest that the density of excited neutral molecules is a more important influence on the nitriding kinetics than the density of ions in this particular process.

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