Abstract
混合ガス中容量結合型RF放電の絶縁破壊特性
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https://doi.org/10.1541/ieejfms1990.121.5_422
Publication Date: Jan 1, 2001 | |
Citations: 1 | License type: free |
混合ガス中容量結合型RF放電の絶縁破壊特性
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