Abstract
A sheath model in an oblique magnetic field is build, which has one-dimension coordinate space and three-dimension speed space. The effects of magnetic field on the structure of RF sheath and parameter characteristics are discussed. The numerical simulation result shows that magnetic field has great effects on the sheath structure, especially in the region near the edge of sheath. Also, the magnetic field affects ion energy in the direction vertically to the board and incidence departure angle.
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