Abstract
A method to integrate micromechanical frequency-determining elements along with the corresponding electromechanical transducers into a poly or single-crystal silicon film layer is demonstrated. A resistor dissipating several microwatt of power induces high-frequency resonant mechanical motion in a shallow-shell membrane. Transduction from the mechanical to the electrical domain is performed using implanted piezoresistors, which are sensitive to strain produced by resonant motion. Self-sustained oscillations at 10 MHz are demonstrated when the device is directly coupled to a high-impedance operational amplifier and a positive feedback loop. Finally, this letter discuss how the resonator and transducers may be incorporated into standard integrated-circuit technology
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
