Abstract
A RF micrelectromechanical-system variable capacitor with Non-Planar Up-plate and Side Leverage Electrode structure is proposed to achieve a large tuning ratio and excellent linearity for tunable BAN front-end application. The proposed variable capacitor was modeled and simulated using CoventorWare. The result shows the tuning ratio of the capacitor is 400 %. An impedance matching prototype model with the proposed capacitors is modeled and simulated using ADS software. The variable capacitor and matching network are realized using surface micromachining process and the fabrication results are demonstrated.
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