Abstract
AbstractAn initial study of the RF hollow cathode plasma jet deposition of BaxSr1-xTiO3 has been performed. Deposition occurred from a single composite nozzle consisting of BaTiO3 and SrTiO3 at substrate temperatures on the 500-550 C range. It has been shown that film composition can be easily controlled by the nozzle composition as well as other deposition parameters. The as-deposited films exhibit clear BSTO peaks with grain size on the order of 30nm.
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