Abstract
Thin films of cubic , which is one of the sodium tungsten bronze, were fabricated by rf sputtering for the electrode applications in integrated sensors and actuators. A single-phase cubic sputtering target of power type was prepared by conventional solid-state reaction. Thin films were deposited from the powder target, and the as-deposited films were amorphous, thus they annealed by tube furnace or RTP for crystallization. Thin films having cubic phase were fabricated by the optimization of sputtering and post-annealing conditions, but single-phase cubic thin films were not obtained. Although the films were not in single phase, they had good electrical conduction properties showing electrical resistivities of order.
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