Abstract
Fabrication of micro devices from thermoplastic polymers by ultrasonic processing has become a promising new technology in recent years. Microstructures are generated on polymer surfaces with cycle times of a few seconds and are tightly sealed in even shorter times. Investment costs and energy consumption are comparatively low and processes are very flexible enabling economic fabrication even for small-scale production. For large-scale production role-to-role fabrication has been shown reducing costs even more. A variety of micro devices have been introduced up to now mostly for microfluidic applications. Besides this, electronic circuit boards are fabricated by ultrasonic processing.
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