Abstract

Abstract Micro-electro-mechanical systems reveals excellent versatility and malleability in miniaturization device with having a compacted aspect, less usage of energy, as well as performing up to the mark. MEMS systems have multiple and significant potential to create a novel ground of mobile equipment uses with enhanced flexible and enhanced reliable aspect. Current study deals with investigations conducted to develop actuator and sensor bases on MEMS and MEMS-based applications. At a lower cost than ever before, the current trend in micro / Nano systems is to fabricate smaller, lighter and more powerful devices. Continued advancements in MEMS technology have resulted in a multitude of previously impossible new devices being created. Nevertheless, these devices ' implementations are limited by their integration and packaging problems. Considering design and fabrication issues, a review on the MEMS future and the significant importance of those material in future is illustrated. We will address some of these issues in MEMS technology in this study.

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