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Abstract
Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.
Highlights
This section, MEMS micromirrors based on solid-state thermal actuators will be reviewed
At electrothermal MEMS micromirrors integrated with other types of actuation mechanisms the end, electrothermal MEMS micromirrors integrated with other types of actuation such as electrostatic and electromagnetic actuators are reviewed
Electrothermal actuators are devices that can transform electric energy to thermal energy and to mechanical energy. These MEMS devices are promising in myriads of applications, such as micro-tweezers, micro-needles and micromirrors
Summary
Electrostatic micromirrors can realize high speed scanning with low power consumption but need high drive voltage [9]. Piezoelectric micromirrors consume low power and requires only moderately high driving voltage but have limited scanning range [10]. Electrothermal micromirrors typically have large scan range and low drive voltage but consume relatively high power [5,11]. Electrothermal micromirrors, according to their electrothermal actuation mechanisms, can be divided into hot-cold arm, chevron, thermal-bimorph, thermopneumatic, and thermocapillary micromirrors. Electrothermal actuators combined electrostatic or and thermo-pneumatic actuators have been employed in scanningwith micromirrors electromagnetic actuators have been explored to take their respective advantages [17,18]. Section 3actuation, is focused on the electromalthat actuation mechanisms, U-shape and V-shape thermo-pneumatic thermal thermo-capillary actuation mechanisms, including.
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