Abstract
This paper describes investigation of good procedure of heat process by electric current heating to fabricate good shape memory alloy micro-actuators on silicon substrates, measuring and controlling the temperature of the SMA thin films by use of an infrared radiation thermometer. In this experiment, the heat process by electric current heating was attempted for crystallization of RSMA thin films and the results were reported. To demonstrate that free standing sputter-deposited titanium-nickel (TiNi) alloy thin films could fulfil RSMA actuator's function, the sputter-deposited TiNi alloy thin films were peeled off from the substrates on purpose, crystallized by the heat process by electric current heating, shape memorized, and evaluated and analyzed experimentally. The RSMA thin film actuator crystallized at 600/spl deg/C for 1 minute shape-recovers perfectly on heating and bends to opposite side perfectly on cooling.
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