Abstract
A blend of low molecular azo glass (AZOPD) and polystyrene (PS) were used for the systematic investigation of photo-induced stretching and recovery of nanoimprinted structures. For this purpose, light and heat was used as recovery stimuli. The AZOPD/PS microstructures, fabricated with thermal nanoimprint lithography (tNIL), comprises three different shapes (circles, crosses and squares) and various concentrations of AZOPD fractions. The results show a concentration-dependent reshaping. Particularly the sample with 43 w-% of the AZOPD fraction have shown the best controllable recovery for the used parameters. A possible explanation for shape recovery might be the stabilizing effect of the PS-matrix.
Highlights
For several decades, manufacturing methods have been further developed to fabricate micro- and nanostructures cost- and time-efficiently, while maintaining high precision in shape and in high throughput [1,2,3]
Chou et al published for the first time on thermal nanoimprint lithography process showing sub-25 nm structures [5,6,7]
The stretching was achieved by irradiation with a polarized and monochromatic single laser beam [32,33,34,35]. It could be demonstrated by several groups that the photo-induced stretching could be recovered to the initial geometry by irradiating the same area again with perpendicularly polarized light [36,37,38]
Summary
For several decades, manufacturing methods have been further developed to fabricate micro- and nanostructures cost- and time-efficiently, while maintaining high precision in shape and in high throughput [1,2,3]. Chou et al published for the first time on thermal nanoimprint lithography process (tNIL) showing sub-25 nm structures [5,6,7]. Since it has been complemented by different techniques The stretching was achieved by irradiation with a polarized and monochromatic single laser beam [32,33,34,35] It could be demonstrated by several groups that the photo-induced stretching could be recovered to the initial geometry by irradiating the same area again with perpendicularly polarized light (compared to first irradiation) [36,37,38]. To name but a few examples, Wang et al [36]
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