Abstract
A TiN-based substrate with high reusability presented high-sensitivity refractive index measurements in a home-built surface plasmon resonance (SPR) heterodyne phase interrogation system. TiN layers with and without additional inclined-deposited TiN (i-TiN) layers on glass substrates reached high bulk charge carrier densities of 1.28 × 1022 and 1.91 × 1022 cm−3, respectively. The additional 1.4 nm i-TiN layer of the nanorod array presented a detection limit of 6.1 × 10−7 RIU and was higher than that of the 46 nm TiN layer at 1.2 × 10−6 RIU when measuring the refractive index of a glucose solution. Furthermore, the long-term durability of the TiN-based substrate demonstrated by multiple processing experiments presented a high potential for various practical sensing applications.
Highlights
The detection and treatment or removal of harmful materials in water are essential for environmental protection
The TiN (Figure 1a) and TiN/inclined-deposited TiN (i-TiN) (Figure 1b) thin layers deposited on the Si substrate were visualized through scanning electron microscopy
Analytical solutions of multilayer reflectivity were used to acquire with various wavelengths (Figure 3), reflectivities (Figure 4a,c), and phase differences (Figure 4b,d) for various light incident angles based on the Fresnel equation for multiple optical reflections and transmissions; light was illuminated from the glass substrate to a 46 nm TiN layer covered with glucose solutions of various
Summary
The detection and treatment or removal of harmful materials in water are essential for environmental protection. I.e., bacteria and viruses, can be detected through polymerase chain reaction (PCR) [14,15,16]. These methods may require reagents and instrumentation that are cost-intensive. They are difficult in processing real-time and long-term applications for drinking water monitoring. The dissolution of many biological or chemical materials typically leads to sudden alterations in the refractive index of water. High-sensitivity sensors and methods of long-term durability are demanded for ultralow refractive index changes and high stability in water monitoring [17,18,19]
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