Abstract
More and more old machines have the problem that their control electronics’ lifecycle comes to its intended end of life, whilst the mechanics itself and process capability is still in very good condition. This article shows an example of a reactive ion etcher originally built in 1988, which was refitted with a new control concept. The original control unit was repaired several times based on manufacturer’s obsolescence management. At start of the retrofit project the integrated circuits were no longer available for further repair of the original control unit. Safety, repeatability and stability of the process were greatly improved.
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