Abstract
A process for retrieving experimental high-resolution high-angle annular dark field (HAADF) scanning transmission electron microscopy (STEM) images, which are systematically distorted by environmental and/or instrumental instability in addition to the convolution influence of the probe, is demonstrated using a HAADF-STEM image of an antimony-rich basal plane inversion boundary in Sb2O3-doped ZnO ceramics recorded in the [0110] zone axis. The process includes a correction of the diffractogram of the HAADF-STEM image by referring to the diffractogram of a high-resolution transmission electron microscopy image of the same area. The corrected diffractogram is used for deconvolution processing combined with the maximum entropy method. The retrieved images show bright spots regarded as the object function. Thus, the processing of the experimental HAADF-STEM image provides almost a real projected atomic structure by reforming the systematic distortion and eliminating the effects of the probe function.
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