Abstract
Improved properties of aluminum zinc oxide (AZO) thin films deposited by the magnetron sputtering at room temperature are reported. AZO is one of the most promising transparent conducting oxide materials, which widely used in thin film solar cells. In this study the optimization process of the DC magnetron sputtered AZO films was carried out at room temperature by studying its structural, optical, electrical and morphological properties at different deposition times (5, 10, 15, 20 and 25 min). It can be utilized as a front contact for the cadmium telluride (CdTe) based thin film solar cells. The structural study shows that the preferred orientation of grains is along plane (002), with a hexagonal structure of the grains. The electrical and optical characteristics show that the films has an average transmission of 70 % and a resistivity of the order of 10−4 Ω cm. The morphology analysis suggests the formation of packed grains with a homogeneous surface.
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