Abstract
Beryllium samples were implanted with 2.5 keV/atom deuterium with a flux of 9.3 × 10 18 D + 2/m 2 s at room temperature, and the amount of deuterium retained as a function of incident fluence was measured using the elastic recoil detection technique (ERD) with a 1.5 MeV 4He beam. From the results obtained, it was found that the mean depth of the implant is about 0.06 μm and agrees with the theoretical mean projection range, and the saturation concentration is 0.36 D/Be at the saturation fluence of about 4 × 10 22 D/m 2. Isochronal annealing of the implanted samples showed that deuterium is thermally released in two stages, namely at temperatures below 150°C and around 400°C.
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