Abstract
Retention and re-emission of 125– 1000–eV D+ ions in stainless steel has been measured at 90, 300, and 500 °K. Saturation of retained fluence in a 90 °K target occurs when there is approximately one retained atom for every metal atom within the range of this projectile. Implantation at 300 and 500 °K shows saturation at densities three to five times smaller than the low-temperature implant. Backscattering coefficients are determined to range from 0.5 at 125 eV to 0.3 at 1 keV; these are consistent with computer simulations. Thermally induced re-emission of deuterium retained after bombarding a room temperature target has a diffusive character with an activation energy of 14.7 kcal/mole.
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