Abstract
Several rotors were calibrated both at ETL and IMGC in the pressure range from 10 −4 to 100 Pa. The calibrations were performed in argon atmosphere by using a static multi-stage system at the ETL and dynamic and static apparatus at IMGC. With stable rotors, the comparison showed that the two laboratories agree within 1%. Two rotors were calibrated also at higher pressures, with the aim of increasing the comparison range; for pressure up to 10 Pa there is a maximum increase of the gauge coefficient of 1%; at this pressure level a comparison is still significant and the results of ETL and IMGC are in good agreement.
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