Abstract
AbstractResults are reported for a round robin involving ion scattering peak positions and FWHM measurements from seven cylindrical mirror analyzer (CMA) based instruments from the same manufacturer. The specimen used in the round robin was a Cu–Ag–Au ternary alloy. The ion scattering data were obtained using 4He and 20Ne ions at 1 and 2 keV. Within the set of data for any given peak, the spread in the FWHM values was >70%, and the variation between the maximum and minimum CMA voltages was ∼8.5% A comparison of the experimental data with the results of calculations involving the dispersion characteristics of a CMA and the scattering equation suggests that much of the spread in the peak position is associated with the position of the specimen with respect to the CMA geometry. The cause of the spread in the FWHM measurements is unknown. Further analysis of the data indicates an inelastic energy loss of ∼3% for 20Ne scattering from Ag at 2 keV.
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