Abstract
Research is in progress to develop microminiature thermionic converters (MTCS) with high energy conversion efficiencies and variable operating temperatures using semiconductor integrated circuit (IC) fabrication methods. The use of IC techniques allows the fabrication of MTCS with cathode to anode spacing of several microns or less and with anode and cathode materials that will have work fimctions ranging from 1 eV to 3 eV. The small cathode to anode spacing and variable electrode work functions should allow the conversion of heat energy to relatively large current densities (up to tens of Amps/cmz) at relatively high conversion efficiencies ( 15-25%).
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