Abstract
For several years the University of Arizona Imaging Technology Laboratory (ITL) has developed Charge Coupled Device image sensors for the Large Synoptic Survey Telescope (LSST) project. These sensors were designed by Semiconductor Technology Associates, Inc. and then backside processed and characterized at ITL. The LSST project provided a set of specifications which the sensors must meet as well as a guideline for the acquisition and analyze process which they will use to verify sensor performance. We describe in this paper the characterization results from similar testing at ITL before shipment of the sensors. We include both electro-optical and metrology results. Specific measurements described here include dark signal, quantum efficiency, read noise, charge transfer efficiency, and charge diffusion as well as sensor flatness (and both room and operating temperatures) and absolute position.
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