Abstract
A resputtering effect in Ba(Pb, Bi)O3 has been found to vary from complete film and partial substrate erosion to slightly altered film surface microstructure and bulk composition. It is strongly dependent on the sputtering conditions; only the films prepared at the higher gas pressures (≳200 mTorr) show no resputtering, apparently due to gas phase interactions. The most striking result, other than the obvious surface erosion, is the Ba deficiency, ranging from 10 to 70 at. %, that is directly related to the degree of resputtering. Similar results have been seen for other alkaline earth perovskites.
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