Abstract
A novel approach for gas sensing based on mechanical resonance of ZnO nanowires is reported. For this purpose, ZnO nanowires were grown between comb-like electrodes using a novel oxygen plasma treatment approach. Then gas measurements were carried out at different agitating frequency. Results show an improvement in gas sensitivity of resonantly excited ZnO nanowires. Our results open up a promising approach to fabricate high sensitivity gas sensor. Also we have introduced an alternative frequency modulation gas detection method here.
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