Abstract
We proposed and fabricated resonant-tunneling-diode (RTD) terahertz oscillators integrated with a cylindrical cavity. Oscillation frequency of 3 THz is expected from theoretical analysis. As a preliminary experiment, the proposed oscillator was fabricated using electron-beam lithography with a three-layer-resist process. An oscillation of up to 1.79 THz was obtained in the fabricated oscillators, which was lower than the theoretical expectation. This was because of a parasitic capacitance of the metal post connecting the cavity and the RTD. Theoretical calculations, including this parasitic capacitance, agreed well with the experiment. The parasitic capacitance can be suppressed by adding a simple process to the cavity fabrication.
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