Resonant Polysilicon Antenna for Terahertz Detection

Ze Shen,Feng Yan,Yiming Liao,Xiaoli Ji,Biaobing Jin,Ke Wang

doi:10.1109/jphot.2019.2923195

Abstract

Resonant antennas have garnered considerable interest in terahertz and visible regimes owing to its extraordinary localized field concentration capability. In this work, we experimentally demonstrate a novel metal-free terahertz detector, which is fashioned by heavily doped polysilicon using standard CMOS process. The computational results show that the incident field can be largely enhanced within the antenna gap area at the resonance of 650 GHz. The room temperature measured results show that the responsivity and noise equivalence power of the detector integrated with the optimized antenna design is 600 V/W and 200 pW/Hz0.5 at 650 GHz, respectively. Aided by an equivalent circuit model, theoretical analysis is carried out to elucidate that the field enhancement ratio of the resonant polysilicon antenna is comparable to gold made antenna at terahertz frequencies. Our study provides a new approach for designing a low-cost and CMOS-compatible terahertz detector characterized with strongly localized field, projecting more insights on light-matter interaction at terahertz frequencies.

Highlights

Field effect transistors (FETs) for terahertz detection were early reported by M
Aided by an equivalent circuit model, theoretical analysis is carried out to elucidate that the field enhancement ratio of the resonant polysilicon antenna is comparable to gold made antenna at terahertz frequencies
The detected signal is directly fed into a lock-in amplifier, which is synchronized at the modulation frequency

Summary

Introduction

Field effect transistors (FETs) for terahertz detection were early reported by M. Shur in 1996 [1]. Later it was pointed out that such type of terahertz detectors has many promising aspects such as room temperature operation, on-chip compatibility as well as easy array fabrication, which makes them well-suited in the terahertz imaging and spectroscopy technologies [2]. One major concern in the CMOS terahertz detector design is how to effectively couple the free space terahertz waves to the transistor [3], [4]. Since the time of Hertz, antenna has been proved to be an effective way to collect free space radio energy and widely been used in radio receivers

Methods

Results

Discussion

Conclusion