Abstract

Resonant optical absorption of ground state Ce atoms is demonstrated. Ce I resonant emission line at 461.05 nm (Aij = 28 × 108 s−1) corresponding to the transition 4f5d6s2–4f2(1G)5d (2I)6s is utilized. In a magnetron sputtering discharge used as an atomic source, the absolute densities of atomic ground state Ce sputtered in pure Ar and in Ar–O2 (oxidized magnetron cathode) gas mixtures are found to be nearly 2 × 108 cm−3 (pure Ar) and 1 × 107 cm−3 (Ar + O2). The phenomena inherent in reactive sputtering, such as the non-oxidized–oxidized regime transition and the hysteresis of the transition point, are detected. The obtained data are compared with the existing results of a similar absorption analysis performed in the Ti dc magnetron discharges. The discrepancies in the obtained Ce and Ti absolute ground state densities are analysed.

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