Abstract
This paper reports on the first demonstration of a high resolution (noise equivalent power NEP of 1.9 nW/Hz1/2 at 200 Hz bandwidth) and fast (thermal time constant of 5.3 ms) infrared (IR) detector based on a nanoelectromechanical system (NEMS) resonant piezoelectric fishnet-like metasurface (PFM). For the first time, an ultrathin (650 nm) piezoelectric fishnet-like metasurface is employed to form the vibrating body of a nanomechanical resonator with a unique combination of optical, thermal and electromechanical properties. Efficient sensing and actuation (electromechanical coupling coefficient, k t 2∼1.4%) of a high frequency (172 MHz) and high quality factor (Q∼2254) bulk acoustic mode of vibration in the free-standing ultrathin structure is achieved thanks to the superior piezoelectric transduction properties of the proposed metasurface. Strong absorption (60%) of short wavelength infrared (SWIR) radiation in the ultra-low volume resonant device is obtained thanks to the properly engineered optical properties of the fishnet-like metasurface which provide a Fabry-Perot like resonance at ∼4 µm to the structure.
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