Abstract
Abstract The resonant-frequency tuning of a self-aligned angular vertical comb-driven electrostatic microscanner is demonstrated by the electromechanical spring effect. The microscanner is fabricated on a silicon-on-insulator wafer using the plastic deformation of silicon. A tuning electrode is fabricated to be electrically separated from the actuation electrode to tune the resonant frequency by adjusting the applied direct-current voltage bias. The experimentally obtained maximum resonant-frequency shift was 3.2% when the resonant frequency of 3167 Hz is reduced to 3066 Hz when a tuning voltage of 30 V was applied while maintaining the actuation voltage. The method enables facile frequency tuning without any permanent geometrical modification to the microscanner.
Highlights
Electrostatic actuators are widely utilized in microelectromechanical systems owing to their various advantages compared to other actuation schemes
The microscanner is fabricated on a silicon-on-insulator (SOI) wafer by utilizing a plastic deformation process [16] in which the moving comb electrode and fixed comb electrode are vertically interdigitated, forming an initial tilt angle
Frequency tuning of an angular vertical comb (AVC)-driven microscanner was demonstrated by utilizing the electromechanical spring effect
Summary
Electrostatic actuators are widely utilized in microelectromechanical systems owing to their various advantages compared to other actuation schemes. Electrostatic vertical comb actuators are widely adopted for light scanning applications, only a few frequency-tuning methods such as inducing a compressive stress on the flexures [14] or using an angle limiter near the torsional spring [15] have been reported. A frequency-tuning method for an electrostatic self-aligned angular vertical comb (AVC)-driven microscanner is described.
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
