Resonance-type bimorph-based high-speed atomic force microscopy: real-time imaging and distortion correction

Abstract

Resonance-type bimorph-based high-speed atomic force microscopy (HSAFM) capable of operating in the sample-scan and tip-scan modes is presented in this paper. The working principle of the high-speed scanner, the experimental setup, and the data collection system are described in detail. The main characteristic of the high-speed scanner is the use of a piezoelectric bimorph, where one of the piezoelectric layers is used to drive the bimorph beam to scan at a high speed and the other monitors the bimorph vibration. Image distortions due to the phase-lag and sinusoidal scanning are analyzed and simulated. The correction methods for the compensation of the phase-lag and nonlinear movement are proposed based on data shift and nonlinear mapping relations, respectively. The HSAFM imaging at the maximum rate of ~30 frames per second is demonstrated with our data collection and correction program. The image distortions caused by the phase-lag and sinusoidal scanning are effectively eliminated in real-time. This work would provide useful methods for the development of HSAFM and applications in the observation of dynamic processes at nanoscale.