Abstract
The concept of the 'resonance' wave discharge is introduced to explain the high absorption efficiency of inductively coupled helicon plasma source. This discharge is supported by long-scale weakly damped eigenmodes excited in plasma resonator. The RF power absorbed in it is inversely proportional to electron collision frequency. The fields excited by simple single-loop inner antenna and its impedance are calculated in a cylindrical metal resonator. At low collision frequencies the field amplitudes and antenna resistance are shown to peak sharply near the helicon dispersion branches.
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