Resonance properties of shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 at room and high temperatures

Abstract

The resonance properties of shear-horizontal surface acoustic waves on Ca3TaGa3Si2O14 (CTGS) with Au or Al interdigital transducers (IDTs) were investigated. IDT-type resonators were fabricated on CTGS (0°, 134° or 155°, 90°) using Au- or Al-IDT, and the strong resonance properties and near-zero temperature coefficient of frequency (TCF) were measured at a certain electrode film thickness. From the measured and simulated results, an effective coupling factor of approximately 1.2% and zero TCF can be simultaneously obtained by using not only a high-density Au-IDT but also an Al-IDT and by adjusting the cut angle and electrode film thickness. Moreover, the resonance properties on Au-IDT/CTGS were evaluated at temperatures up to 570 °C. From the cut-angle dependences of the frequency shift calculated using the determined second-order temperature coefficients of the elastic constants, the potential for sensor applications that measure not only temperature but also pressure in such high-temperature environments can be expected.