Abstract
The authors report on the development of quantum dot microdisk resonators grown by metal-organic chemical vapor deposition. Two stacked layers of InAs quantum dots embedded in a lattice-matched InGaAlAs (λg=1.47 μm) are grown on (100) InP substrate. A new approach for the fabrication of active microdisk resonators is developed using focused-ion beam (FIB) followed by selective wet-chemical etching. Electrical and optical characterization of the resonator is presented. Emission in the C-band at whispering-gallery modes is observed.
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