Abstract
This paper reports a deep study of the frequency response of ZnO-based piezoelectric cantilevers. Laser vibrometry and impedance measurements have been carried out on such devices, obtaining a good agreement in the characteristic frequencies. However, certain resonances that are clearly identified thanks to the high sensitivity of the laser vibrometer do not show the corresponding impedance change. A computational model has been successfully developed to allow us to explain this behaviour based on the piezoelectric charge generated by the different modes. Finally, we discuss the essential role played by the modal shapes in the electrical detection of the resonances.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
