Abstract
High-efficiency resonance-domain diffractive microlens arrays with high numerical apertures and 100% fill factor were designed, fabricated, and characterized. Fabricated arrays of eight off-axis microlenses with pitch 127μm and numerical aperture 0.2 demonstrated diffraction-limited collimation of fiber light at 632.8nm wavelength. Optical measurements revealed diffraction efficiency exceeding 93%, in match to numerical calculations with rigorous conical diffraction. The resonance-domain diffractive microlens arrays are highly suitable for applications in fiber optics, multispot optical tweezers, optical sensors, and spectrometry.
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