Abstract
We report the suspended assembly for the fabrication of resonator using multi-wall carbon nanotubes (MWNT). To vibrate a MWNT on plane surface, it should need suspension of a MWNT across trench electrodes. So we propose fabrication method of a MWNT resonator using dielectrophoresis (DEP). By drying the solution during DEP assembly, the capillary force pulls the MWNT toward the bottom substrate, and the MWNT then remains as a deformed structure adhering on the bottom substrate after the solution has dried out. Show successful results which are some SEM images of suspended MWNT. And so, resonances can be detected.
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