Abstract
For HF operation of surface acoustic wave (SAW) devices, the resonance properties and temperature coefficient of frequency (TCF) of the longitudinal leaky SAW (LLSAW) third harmonic on a bonded structure comprising a LiNbO3 (LN) thin plate and quartz support substrate were simulated using a finite element method. The theoretical results showed that, by utilizing the bonded structure, the third harmonic can be excited more strongly than when using a single LN substrate. The TCF of the LLSAW fundamental wave had larger absolute values than that of a typical SAW device.
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