Resolving the Discrepancy between Observed and Calculated Penetration Depths in Grazing Incidence X-Ray Topography of 4H-SiC Wafers

Abstract

Synchrotron X-ray Topography with grazing incidence geometry is useful for discerning defects at different depths below the crystal surface, particularly for 4H-SiC epitaxial wafers. However, the penetration depths measured from X-ray topographs are much larger than the theoretical values. In order to interpret this discrepancy, we simulate topographic contrast of dislocations based on two of the most basic contrast formation mechanisms – orientation contrast and kinematical contrast. Orientation contrast considers merely the displacement fields associated with dislocations while kinematical contrast also takes the diffraction volume into account. The diffraction volume is defined by the effective misorientation around dislocations and the rocking curve width for particular diffraction vector. Ray Tracing Simulation has been carried out to visualize dislocation contrast for both models, taking into account the photoelectric absorption of X-ray beams inside the crystal. Results show that orientation contrast plays the key role in determining both the contrast and X-ray penetration depths for different types of dislocations.