Resolution in soft X-ray microscopes

Abstract

X-Ray microscopes are able to image thick, wet biological specimens at 50 mm or better resolution, to perform elemental analysis at 0.1–10 μm resolution with as high as ppm sensitivity, and to analyze surface composition at 0.1–1 μm resolution. We concentrate here on the use of soft X-rays, where the wavelength is typically >1 nm, although mention of some techniques and results at shorter wavelength is also made. We discuss the physical priciples behind X-ray microscopes, the types of optical systems used and their achievable resolution. resolution limitations imposed by radiation damage, and recent application of X-ray microscopes to the imaging of biological, materials science, geological, and other specimens.